| Lec. | Date | Subject | Reading | Course Notes | Internet | Papers | HWs |
|---|---|---|---|---|---|---|---|
| 1 | 08/26 | Introduction | Chapter 1 | Class1 | MEMSCAP-MUMPs | ||
| 2 | 8/31 | Lithography | Chapter 2 | Class2 | Sandia MEMS Videos, Videos | paper 1 | |
| 3 | 9/2 | Lithography | Chapter 2 | Class3 | MUMPs Process | ||
| 4 | 9/7 | Oxidation | Chapter 3 | Class4 | PolyMUMPs-references | paper 2 | HW #1,Solution |
| 5 | 9/9 | Oxidation | Chapter 3 | Class5 | MUMPs FAQ | ||
| 6 | 9/14 | Oxidation, Pin-joints | Chapter 3 | Class6 | MEMS Industry Group | ||
| 7 | 9/16 | CAD Tools for MEMS | Chapter 3 | Class7 | MUMPs Microrobots | paper 3 paper 31 | HW #2,Solution |
| 8 | 9/21 | Comb Resonators | Chapter 3 | Class8 | MUMPs Schedule | ||
| 9 | 9/23 | Comb Resonator | Chapter 4 | Class9 | MUMPs Price | paper 4 | |
| 10 | 9/28 | Diffusion, Residual Stress | Chapter 4 | Class10 | Design Rules | ||
| 11 | 9/30 | Diffusion | Chapter 4 | Class11 | Sandia SUMMit Process | paper 5 | HW #3,Solution |
| 12 | 10/5 | Diffusion | Chapter 4 | Class13 | BSAC | ||
| 13 | 10/7 | Exam I | Chapter 4 | Class12 | Sandia MEMS | HW #3 CAD file, | Old Exam, Solution |
| 14 | 10/12 | Diffusion, Hinges | Chapter 4 | Class14 | Etching Data | paper 6 | HW #4, Solution |
| 15 | 10/14 | Heactuator | Class15 | Multiple Mode Resonator | CADproject | ||
| 16 | 10/19 | Scratch Drive, Vertical Comb | Chapter 6 | Class16 | Tangential Drive | HW#5, Solution | |
| 17 | 10/21 | Other Actuators | Chapter 6 | Class17 | Electromagnetic Actuator | ||
| 18 | 10/26 | Project Introduction | Chapter 5 | Class18 | Vertical Actuator | paper 7 | HW #6, Solution |
| 19 | 10/28 | Thin Film Evaporation | Class19 | MUMPs Microchannels | |||
| 20 | 11/2 | Project Layouts & MUMPs Design Rules | Class20 | MEMS Jobs | paper 8 | ||
| 21 | 11/4 | LPCVD & Ion Implantation | Class21 | Clearing House | paper 9 | HW #7, Solution | |
| 22 | 11/9 | Bulk-Micromachining | Class22 | MOSIS | |||
| 23 | 11/16 | Bulk-Micromachining | Class23 | MEMS Exchange | paper 10 | ||
| 24 | 11/18 | Exam II | Class24 | Nanotechnology News | ImplantTable | ||
| 25 | 11/23 | LIGA Process | Class25 | MEMS-Japan | |||
| 11/25 | Thanksgiving Holiday | ||||||
| 26 | 11/30 | Project Presentations | Class26 | LIGA Video | |||
| 27 | 12/2 | Project Presentations | Class27 | OldExam2 |
Last updated: April, 14 2021 by Liwei Lin