| Lec. | Date | Subject | Reading | Course Notes | Internet | Papers | HWs |
|---|---|---|---|---|---|---|---|
| 1 | 08/27 | Introduction | Chapter 1 | Class1 | MEMSCAP-MUMPs | ||
| 2 | 9/1 | Lithography | Chapter 2 | Class2 | SEMs | paper 1 | |
| 3 | 9/3 | Lithography | Chapter 2 | Class3 | MUMPs Process | ||
| 4 | 9/8 | Oxidation | Chapter 3 | Class4 | PolyMUMPs-references | paper 2 | HW #1 |
| 5 | 9/10 | Oxidation | Chapter 3 | Class5 | MUMPs FAQ | ||
| 6 | 9/15 | Oxidation, Pin-joints | Chapter 3 | Class6 | MEMS Industry Group | ||
| 7 | 9/17 | CAD Tools for MEMS | Chapter 3 | Class7 | SmallTimes | paper 3 paper 31 | HW #2 |
| 8 | 9/22 | Comb Resonators | Chapter 3 | Class8 | MUMPs Schedule | ||
| 9 | 9/24 | Comb Resonator | Chapter 4 | Class9 | MUMPs Price | paper 4 | |
| 10 | 9/29 | Diffusion | Chapter 4 | Class10 | Design Rules | ||
| 11 | 10/1 | Residual Stress & Hinge | Chapter 4 | Class11 | Sandia SUMMit Process | paper 5 | HW #3 |
| 12 | 10/6 | Residual Stress | Chapter 4 | Class12 | Sandia MEMS | ||
| 13 | 10/8 | Diffusion, Project | Chapter 4 | Class13 | BSAC | Old Exam | |
| 14 | 10/13 | Heactuator, Review | Chapter 4 | Class14 | Etching Data | paper 6 | HW #4 |
| 15 | 10/15 | Thin Film Deposition, Vertical Comb | Class15 | Multiple Mode Resonator | CADproject | ||
| 16 | 10/20 | Exam I | Chapter 6 | Class16 | Tangential Drive | HW#5 | |
| 17 | 10/22 | Thin Film Deposition, Scratch Drive | Chapter 6 | Class17 | Electromagnetic Actuator | ||
| 18 | 10/27 | Project Introduction | Chapter 5 | Class18 | Vertical Actuator | paper 7 | HW #6 |
| 19 | 10/29 | Summary of Surface-micromachining | Class19 | MUMPs Microchannels | |||
| 20 | 11/3 | Design Rules | Class20 | MEMS Jobs | paper 8 | ||
| 21 | 11/5 | Project Layouts | Class21 | Clearing House | paper 9 | ||
| 22 | 11/10 | Bulk-Micromachining | Class22 | MOSIS | |||
| 23 | 11/12 | Summary of Surface-Micromachining | Class23 | MEMS Exchange | paper 10 | HW #7 | |
| 24 | 11/17 | LPCVD & Ion Implantation | Class24 | Nanotechnology News | ImplantTable | ||
| 25 | 11/19 | Summary of Bulk-Micromachining | Class25 | Nanotech Jobs | |||
| 26 | 11/24 | LIGA Process | Class26 | MEMS-Europe | |||
| 11/28 | Thanksgiving Holiday | ||||||
| 27 | 12/1 | Review | Class27 | OldExam2 | |||
| 28 | 12/3 | Exam II |
Last updated: July 16, 2015 by Liwei Lin