ME219
Spring 2010

Parametric and Optimal Design of MEMS

Instructors:

Prof. Liwei Lin, Room 621E Sutardja Dai Hall, (510)643-5495, lwlin@me.berkeley.edu
Teaching Assistants, Navdeep Dhillon ndhillon@eecs.berkeley.edu, Armon Mahajerinarmonmah@me.berkeley.edu

Class Meetings:

Lecture, Monday Wednesday and Friday, 3113 Etcheverry, 9:00 - 10:00am
Office Hours, Monday, Tuesday, Wednesday, 10-11am
TA Office Hours, Navdeep Dhillon, W 2-3pm, 571 Cory

Course Descriptions:

Parametric design and optimal design of MEMS. Emphasis on design, not fabrication. Analytic solution of MEMS design problems to determine the dimensions of MEMS structures for specified function. Trade-off of various performance requirements despite conflicting design requirements. Structures include flexure systems, accelerometers, and rate sensors.

Prerequisite: 119 and C218/Electrical Engineering C245 are highly recommended but not mandatory

Text Books:

R.C. Jaeger, "Introduction to Microelectronics Fabrication," 2nd edition, Addison-Wesley, 2000. (reference)
S. Senturia, "Microsystem Design," Kluwer Academic Publishers, 2000. (reference)
M. Madou, "Fundamentals of Microfabrication," CRC Press, 1997. (reference)
T.R. Hsu, "MEMS & Microsystems Design and Manufacture," McGraw Hill, 2001. (reference)
G.T.A. Kovacs, "Micromachined Transducers - Sourcebook," McGraw-Hill, 1998. (reference)
J.P. Uyemura, "Principle Desing of CMOS Integrated Circuits Using L-EDIT," PWS Publishing Company, 1995. (reference)
S.M. Sze, "Semiconductor Sensors," John Wiley & Sons, Inc, New York, 1994. (reference)

Projects:

Three projects.

Grading:

30% Project#1
30% Project#2
40% Project#3

Last updated: January 13, 2010 by Liwei Lin