Paper | Authors | Title | Journal | Volume,Page | Year |
---|---|---|---|---|---|
1 | L.S. Fan, et al. | Integrated Movable Micromechanical Structures for Sensors and Actuators | IEEE Trans. on Electron Devices | ED-35, 724-730 | 1988 |
2 | W.C. Tang, et al. | Laterally Driven Polysilicon Resonant Microstructures | Sensors and Actuators -A Physical | Vol. 20, 25-32 | 1989 |
3 | H. Guckle, et al. | A Simple Technique for the Determination of mechanical Strain in Thin Films with Applications to Polysilicon | J. Appl. Phys. | Vol. 57, pp.1671-1675 | 1985 |
3+ | L. Lin, A. Pisano and R.T. Howe | A Micro Strain Gauge with Mechanical Amplifier | IEEE/ASME Journal of MEMS | Vol. 6, pp.313-321 | 1997 |
4 | K.S.J. Pister and R. Fearing | Microfabricated Hinges | Sensors and Actuators | Vol. A33, 249-256 | 1992 |
5 | J. Comtois and V. Bright | Surface Micromachined Thermal Actuator Arrays and Applications | Solid-State Sensor and Actuator Workshop, Hilton Head | 174-177 | 1996 |
6 | Fukuta, Y. et al. | Microactuated Self-Assembling of 3D Polysilicon Structures with Resahing Technology | Proceedings of the 10th Annual Workshop of Micro Electro Mechanical Systems | 477-481 | 1997 |
7 | E. Bassous | Fabrication of Novel Three-Dimensional Microstructures by Anisotropic Etching of (100) and (110) Silicon | IEEE Trans. on Electron Devices | Vol. ED25, 1178-1185 | 1978 |
8 | C.J. Kim, A.P. Pisano and R.S. Muller | Silicon-Processed Overhaning Microgripper | J. of Microelectromechanical Systems | Vol. 1, 31-36 | 1992 |
9 | K.E. Peterson | Silicon as a Mechanica Material | The Proc. of IEEE | Vol. 70, 420-457 | 1982 |
10 | W. Bacher, W. Menz and J. Mohr | The LIGA Technique and Its Potential for Microsystems- A Survey | IEEE Trans. on Industrial Electronics | Vol. 42, 431-441 | 1995 |