Prof. Liwei Lin's research interests include microfabrication technologies, micro heat transfer, micro solid mechanics, micro dynamics and micro optics.

Prof. Lin's research awards and grants are from NSF, DARPA, Seagate Technology Inc., Univ. of Michigan, Xerox PARC and Motorola Inc. Several companies are involved in Prof. Lin's research, including Seagate Technology Inc., Motorola Inc., Honeywell Inc., Delco Corp., Analog Devices Inc., and BEI Electronics Inc.

Selected Papers

Microfabrication Technologies

  1. Lin, Liwei, McNair, K., Howe, R.T. and Pisano, A.P., 1993, "Vacuum Encapsulated Lateral Microresonators," 7th Int. Conference on Solid State Sensors and Actuators, Yokohama, Japan, pp. 270-273.

    ==> Micro shell and free standing comb resonator.

  2. Lin, Liwei, Pisano A.P. and Muller, R.S, 1993, " IC-Processed Microneedles," 7th Int. Conference on Solid State Sensors and Actuators, Yokohama, Japan, pp. 237-240.

    ==> Top View (SEM) showing the tip end of a microneedle.

  3. Lin, Liwei, Chiu, C.-J., Bacher, W. and Heckele, M., 1996, " Microfabrication Using Silicon Mold Inserts and Hot Embossing," Seventh International Symposium on Micro Machine and Human Science, pp. 67-71.

    4. ==> A close view of micro pyramid made of PMMA.

  4. Lin, Liwei, T.-T. Cheng and Chiu, C.-J., 1997, " Comparative Study of Hot Embossed Micro Structures Fabricated by Laboratory and Commercial Environment," HARMST, world LIGA forum, Madison, WI, submitted

    5. ==> A nickel electroplated mold insert and plastic duplicate.

Micro Heat Transfer

  1. Lin, Liwei and Pisano A.P., 1991, " Bubble Forming on a Micro Line Heater," ASME Winter Annual Meeting, DSC-Vol.32, pp. 147-163.

    2. ==> A single micro thermal bubble with 5 micron in diameter.

  2. Lin, Liwei, Udell, and Pisano, A.P., 1994, " Phase Change Phenomena on a Heated Polysilicon Micro Heater in Confined and Unconfined Micro Channels," Thermal Sciences and Engineering, Vol.2, pp. 52-59.

    3. ==> A bullet shape micro bubble in a confined microchannel.

  3. Lin, Liwei and Pisano, A.P., 1994, " Thermal Bubble Powered Microactuators," Microsystem Technologies, Vol. 1, pp. 51-58.

    4. ==> A micro thermal bubble under the actuator plate.

  4. Lin, Liwei and Chiao, M., 1996, " Electrothermal Responses of Lineshape Microstructures," Sensors and Actuators, Vol. A55, September, pp. 35-41.

    5. ==> Isotherm around a lineshape micro heater.

Micro Solid Mechanics

  1. Lin, Liwei, Howe, R.T. and Pisano, A.P., 1993, " A Passive in-situ Micro Strain Gauge," 1993 Micro Electro Mechanical Systems Workshop, Ft. Lauderdale, Florida, pp. 206-210.

    2. ==> Reading of residual strain by using a vernier gauge.

  2. Lin, Liwei and Chu, H.-C., 1996, " Large Deflection Effects on Micro Diaphragms : A Theoretical and Experimental Study," ASME International Mechanical Engineering Congress and Exposition, Atlanta, DSC-Vol. 59, pp.447-452.

    3. ==> Nonlinear effects due to large deflection of membranes.

Micro Dynamics

  1. Lee, A.P., Pisano, A.P., and Lin, Liwei, 1991, " Normal and Tangential Impact in Micro Electromechanical Structures," 1991 Micro Electro Mechanical Systems Workshop, pp. 21-26.
  2. Lin, Liwei, Nguyen, C.T.-C., Howe, R.T. and Pisano, A.P., 1992, "Micro Electromechanical Filters for Signal Processing," 1992 Micro Electro Mechanical Systems Workshop. pp. 226-231.

    3. ==> A serial microelectromechanical filter.

Micro Optics

  1. Lee, W.-H, Lin, Liwei, Cheng Y. and Su S., 1996, " Process Optimization and Characterization for Micro Fresnel Zone Plates, " Proceedings of the Photonics/Taiwan '96, Vol. 2, pp. 318-321, Hsin-Chu, Taiwan, 1996.

    2. ==> A micro Fresnel Zone Plate on silicon nitride membrane.

  2. Lin, Liwei, Shia, T.K. and Chiu, C.-J, 1997, " Fabrication and Characterization of IC-Processed Brightness Enhancement Films, " Transducers'97, 9th Int. Conference on Solid State Sensors and Actuators, Chicago, to appear.