ME119 Syllabus

ME119
Introduction to Microelectromechanical Systems
(MEMS)


Class Schedule Fall 2017 (Tentative)


Lec. Date Subject Reading Course Notes Internet Papers HWs
1 08/24 Introduction Chapter 1 Class1 MEMSCAP-MUMPs
2 8/29 Lithography Chapter 2 Class2 SEMs paper 1
3 8/31 Lithography Chapter 2 Class3 MUMPs Process
4 9/5 Oxidation Chapter 3 Class4 PolyMUMPs-references paper 2 HW #1
5 9/7 Oxidation Chapter 3 Class5 MUMPs FAQ
6 9/12 Oxidation, Pin-joints Chapter 3 Class6 MEMS Industry Group
7 9/14 CAD Tools for MEMS Chapter 3 Class7 SmallTimes paper 3 paper 31 HW #2
8 9/19 Comb Resonators Chapter 3 Class8 MUMPs Schedule HW #2 Example
9 9/21 Comb Resonator Chapter 4 Class9 MUMPs Price paper 4 HW #2 Example
10 9/26 Diffusion Chapter 4 Class10 Design Rules
11 9/28 Residual Stress & Hinge Chapter 4 Class11 Sandia SUMMit Process paper 5 HW #3
12 10/3 Residual Stress Chapter 4 Class12 Sandia MEMS
13 10/5 Diffusion, Project Chapter 4 Class13 BSAC Old Exam
14 10/10 Heactuator, Review Chapter 4 Class14 Etching Data paper 6 HW #4
15 10/12 Thin Film Deposition, Vertical Comb Class15 Multiple Mode Resonator CADproject
16 10/17 Exam I Chapter 6 Class16 Tangential Drive HW#5
17 10/19 Thin Film Deposition, Scratch Drive Chapter 6 Class17 Electromagnetic Actuator
18 10/24 Project Introduction Chapter 5 Class18 Vertical Actuator paper 7 HW #6
19 10/26 Summary of Surface-micromachining Class19 MUMPs Microchannels
20 10/31 Design Rules Class20 MEMS Jobs paper 8
21 11/2 Project Layouts Class21 Clearing House paper 9
22 11/7 Bulk-Micromachining Class22 MOSIS
23 11/9 Summary of Surface-Micromachining Class23 MEMS Exchange paper 10 HW #7
24 11/14 LPCVD & Ion Implantation Class24 Nanotechnology News ImplantTable
25 11/16 Summary of Bulk-Micromachining Class25 Nanotech Jobs
26 11/21 LIGA Process Class26 MEMS-Europe
11/23 Thanksgiving Holiday
27 11/28 Review Class27 OldExam2
28 11/30 Exam II

Last updated: August1 16, 2017 by Liwei Lin