| Lec. | Date | Subject | Reading | Course Notes | Internet | Papers | HWs |
|---|---|---|---|---|---|---|---|
| 1 | 08/28 | Introduction | Chapter 1 | Class1 | MEMSCAP-MUMPs | ||
| 2 | 09/02 | Lithography | Chapter 2 | Class2 | SEMs | paper 1 | HW #1 |
| 3 | 09/04 | Lithography | Chapter 2 | Class3 | MUMPs Process | ||
| 4 | 09/09 | Oxidation | Chapter 3 | Class4 | PolyMUMPs-references | paper 2 | HW #2 |
| 5 | 09/11 | Oxidation | Chapter 3 | Class5 | CaMEL | ||
| 6 | 09/16 | Oxidation | Chapter 3 | Class6 | CaMEL Lib2 | ||
| 7 | 09/18 | CAD Tools for MEMS | Chapter 3 | Class7 | CaMEL Lib3 | paper 3 paper 31 | |
| 8 | 09/23 | Pin-Joints, Mechanisms | Chapter 3 | Class8 | CaMEL Lib4 | HW #3 | |
| 9 | 09/25 | Comb Resonator | Chapter 4 | Class9 | CaMEL Lib5 | paper 4 | |
| 10 | 09/30 | Diffusion | Chapter 4 | Class10 | CaMEL Lib6 | ||
| 11 | 10/02 | Residual Stress & Hinge | Chapter 4 | Class11 | Design Rules | paper 5 | HW #4 |
| 12 | 10/07 | Residual Stress | Chapter 4 | Class12 | Sandia MEMS | ||
| 13 | 10/09 | Diffusion, Project | Chapter 4 | Class13 | BSAC | Old Exam | |
| 14 | 10/14 | Heactuator, Review | Chapter 4 | Class14 | Etching Data | paper 6 | HW #5 |
| 15 | 10/16 | Exam I | Class15 | MEMS in Japan | CADproject | ||
| 16 | 10/21 | Thin Film Deposition, Vertical Comb | Chapter 6 | Class16 | Microengineering | HW#X | |
| 17 | 10/23 | Thin Film Deposition, Scartch Drive | Chapter 6 | Class17 | MEMS Industry Group | ||
| 18 | 10/28 | Project Introduction | Chapter 5 | Class18 | SmallTimes | paper 7 | HW #6 |
| 19 | 10/30 | Summary of Surface-micromachining | Class19 | Microsystems | |||
| 20 | 11/04 | Project Layouts | Class20 | MEMS Jobs | paper 8 | HW #7 | |
| 21 | 11/06 | Design Rules & Project Layouts | Class21 | Clearing House | paper 9 | ||
| 22 | 11/11 | Ion Implantation | Class22 | MOSIS | |||
| 23 | 11/13 | Bulk-Micromachining | Class23 | MEMS Exchange | paper 10 | HW#8 | |
| 24 | 11/18 | Bulk Micromachining | Class24 | Nanotechnology News | |||
| 25 | 11/20 | Other Bulk Etching Process | Class25 | Nanotech Jobs | |||
| 26 | 11/27 | Silicon as a Mechanical Material | Class26 | MEMS-Europe | |||
| 11/29 | Thanksgiving Holiday | ||||||
| 27 | 12/02 | LIGA Process | Class27 | ||||
| 28 | 12/04 | Project Presentation, Review | |||||
| 29 | 12/09 | Exam II |
Last updated: August 15, 2008 by Liwei Lin