Introduction to Microelectromechanical Systems
- Small Project: Design of Microelectromechanical Systems by Using MUMPs
The purpose of this project is to use the MUMPs service provided by
MCNC, North Carolina, to exercise your
design experiences of MEMS.
You will need to use an IC layout software such as CADENCE, KIC, MAGIC, LEDIT
or others to draw your designs of microstructures.
Depending on the enrollment of the class, an area of 1000um X 1000um
is expected for each student to make your own microdevices.
You are encouraged to do a good design (a new microstructure of your own)
and your grade will be judged on the effort you put into the design layout.
- Final Project: Design and Analysis of MEMS
The purpose of this project is to exercise your imagination of MEMS.
You can continue working on the small project by using
the MCNC surface micromachining processes.
Or you can change your topic to have different processes such as
bulk-micromachining, LIGA or others.
You are encouraged to use new concept, design new microstructures.
Reports that only discuss things we have covered in the class generally
get lower grades.
are in the last week of the class.