| The ultimate goal of the present work is to fabricate a micro-rotary engine which produces ~10-100 mW of power. A rotary engine was selected for development as the basis of a MEMS-scale power generation system due to several factors: planar design of the rotor and housing, design simplicity due to its “valveless” operation, and power from a rotary engine can be extracted mechanically or electrically. |  |
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| Specifications: | - Rotor:
- Max. RPM (est.): - Power Output (est): - Displacement: |
1 mm
40,000 26 mW 0.064 mm3 |
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| Advantages: | Bulk manufacturing allows rapid fabrication
of multiple designs
On campus microfabrication facility Fabrication length scale is within MEMS fabrication tolerance
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