7.2.10 MEMS/Nano

If MEMS represents the major of your PhD study, you should take at least 5 courses from the lists shown below. Of these, at least 1 course should be from the MEMS Core list.

 

You must consult your Major Field Advisor if you are planning to include any of the courses listed in the emphasis areas as part of a non-MEMS minor that has common courses with the emphasis area (e.g. an emphasis in Mechatronics and a minor in Design or Controls).

 

If MEMS represents a minor of your PhD study, you should take at least 2 courses from the lists shown below. Of these, 1 course should be from the MEMS Core list.

 

If Nanoscale Science and Engineering represent the major of your PhD study, you should take 2 of the Core Courses in the core course and two elective courses chosen from two of the possible areas and the weekly Nanoscale Science and Engineering Interdisciplinary Seminar.

 

If Nanoscale Science and Engineering represents a minor in your PhD study, you should take the core course and one course from the lists shown below.

 

You may not double-count courses towards both the major and the minor requirements.

 

Selection of other courses not listed can be done with the approval of the Major Field Advisor and the Vice Chair for Graduate Study. You should prepare a written justification of your selection.

 

Core Courses in MEMS

  • Mech Eng 292J - Advanced Special Topics
  • Mech Eng 118 - Introduction to Nanotechnology and Nanoscience
  • Mech Eng 119 - Introduction to MEMS (Microelectromechanical Systems)
  • Mech Eng C218/Electrical Eng C245 - Introduction to MEMS Design (student can't receive credit for both ME C218/EE C245 and EE 247A&B)
  • Mech Eng C219/Electrical Eng C246 - Parametric and Optimal Design of MEMS
  • Mech Eng 290 - Bio-nano
  • Mech Eng 290G - Laser Processing and Diagnostics
  • Mech Eng 290T - Plasmonic Materials
  • Mech Eng 290U - Interactive Device Design
  • El Eng 247A - Introduction to Microelectromechanical Systems
  • El Eng 247B - Introduction to MEMS Design

 

Courses in MEMS with Integrated Circuits Emphasis

  • Electrical Eng 230A
  • Electrical Eng 143
  • Electrical Eng 243

 

Courses in MEMS with Mechatronics Emphasis

  • Mech Eng 128 - Computer-Aided Mechanical Design
  • Mech Eng 130 - Design of Planar Machinery
  • Mech Eng C134 / Electrical Eng C128 - Feedback Control Systems
  • Mech Eng 224 - Mechanical Behavior of Engineering Materials
  • Mech Eng C225/Mat Sci C212 - Deformation and Fracture of Engineering Materials
  • Mech Eng 228 - Computer-Aided, Optimal Mechanical Design
  • Mech Eng 229 - Design of Basic Electro-Mechanical Devices
  • Mech Eng 230 - Real-Time Applications of Mini and Micro Computers
  • Mech Eng C232 / El Eng C220A - Advanced Control Systems I
  • Mech Eng 233 - Advanced Control Systems II
  • Mech Eng 290U - Interactive Device Design

 

Courses in MEMS with General Mechanical Engineering Emphasis

  • Mech Eng 175 - Intermediate Dynamics
  • Mech Eng 185 - Introduction to Continuum Mechanics
  • Mech Eng 226 - Tribology
  • Mech Eng 248 - Heat Transfer with Phase Change
  • Mech Eng 259 - Microscale Thermophysics and Heat Transfer
  • Mech Eng 260A/B - Advanced Fluid Mechanics I / Advanced Fluid Mechanics II
  • Mech Eng 275 - Advanced Dynamics
  • Mech Eng 280A - Introduction to the Finite Element Method

 

Courses in MEMS with Bioengineering Emphasis

  • Mech Eng C217 - Biomimetic Engineering/Engineering from Biology
  • Mech Eng 290L - Introduction to Nano-Biology
  • Bio Eng 121 - Introduction to Micro and Nanobiotechnology: BioMEMS
  • Bio Eng 151 - Micro/Nanofluidics for Bioengineering and Lab-On-A-Chip

 

Courses in MEMS with Nano Emphasis

  • Mech Eng 290T - Plasmonic Materials
  • Physics 141A/B - Solid State Physics
  • Physics 250 - Special Topics in Physics

 

Courses in MEMS with Nanoscale Synchesis and Processing Emphasis

  • Mech Eng 119 - Introduction to MEMS (Microelectromechanical Systems)
  • Mech Eng 290R - Topics in Manufacturing
  • Chemistry 253A/B - Materials Chemistry I/ Materials Chemistry II
  • Electrical Eng 143 - Microfabrication Technology
  • Electrical Eng 219C - Computer-Aided Verification
  • Electrical Eng 290B - Advanced Topics in Solid State Devices
  • Mat Sci 224 - Magnetism and Magnetic Materials
  • Mat Sci 227 (not taught in 5 years or pulled from catalog)
  • Mat Sci 260 - Surface Properties of Materials

 

Courses in MEMS with Nanoscale Characterization Emphasis

  • Mat Sci 204 - Theory of Electron Microscopy and X-Ray Diffraction
  • Mat Sci 242 (not taught in 5 years or pulled from catalog)
  • Applied Sci and Tech C295R/Chemical Engineering C295R - Applied Spectroscopy

 

Courses in MEMS with Nanoscale Modeling Emphasis

  • Mech Eng 224 - Mechanical Behavior of Engineering Materials
  • Mech Eng 254 - Thermodynamics I
  • Mech Eng 259 - Microscale Thermophysics and Heat Transfer
  • Physics 240A/B - Quantum Theory of Solids
  • Chem C191/Physics C191/Comp Sci C191 - Quantum Information Science and Technology
  • Civ Eng C237/Nano Sci C237 - Computational Nano-mechanics