ME C218
Introduction to MEMS Design.
[3 units]
ONLINE RESOURCES: Course website
CATALOG DESCRIPTION
Physics, fabrication, and design of micro-electromechanical systems (MEMS). Micro- and nano-fabrication processes, including silicon surface and bulk micromachining and non-silicon micromachining. Integration strategies and assembly processes. Microsensor and microactuator devices: electrostatic, piezoresistive, piezoelectric, thermal, magnetic transduction. Electronic position-sensing circuits and electrical and mechanical noise. CAD for MEMS. Design project is required. Also listed as Electrical Engineering C245.
COURSE PREREQUISITES
Graduate standing in engineering or science; undergraduates with consent of instructor.
TEXTBOOK(S) AND/OR OTHER
REQUIRED MATERIAL
COURSE OBJECTIVES
TOPICS COVERED
CLASS/LABORATORY SCHEDULE
Three hours of lecture and one hour of discussion per week.
ASSESSMENT OF STUDENT PROGRESS TOWARD COURSE OBJECTIVES
PERSON(S) WHO PREPARED THIS DESCRIPTION:
